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Q56212948-27F58B02-3604-49A3-AF77-21917C24735E
Q56212948-27F58B02-3604-49A3-AF77-21917C24735E
BestRank
Statement
http://www.wikidata.org/entity/statement/Q56212948-27F58B02-3604-49A3-AF77-21917C24735E
Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process
P2093
Q56212948-27F58B02-3604-49A3-AF77-21917C24735E
BestRank
Statement
http://www.wikidata.org/entity/statement/Q56212948-27F58B02-3604-49A3-AF77-21917C24735E
rank
NormalRank
type
BestRank
Statement
P1545
6
http://www.w3.org/2001/XMLSchema#string
P2093
Adisorn Tuantranont
http://www.w3.org/2001/XMLSchema#string