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Q56212948-5F13F6F1-3AC5-4646-87AB-ABA41FBEA932
Q56212948-5F13F6F1-3AC5-4646-87AB-ABA41FBEA932
BestRank
Statement
http://www.wikidata.org/entity/statement/Q56212948-5F13F6F1-3AC5-4646-87AB-ABA41FBEA932
Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process
P5875
Q56212948-5F13F6F1-3AC5-4646-87AB-ABA41FBEA932
BestRank
Statement
http://www.wikidata.org/entity/statement/Q56212948-5F13F6F1-3AC5-4646-87AB-ABA41FBEA932
rank
NormalRank
type
BestRank
Statement
P5875
257440053
http://www.w3.org/2001/XMLSchema#string