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Q56212948-9AC3E05E-56CB-4956-994B-2B8AB01A6FA4
Q56212948-9AC3E05E-56CB-4956-994B-2B8AB01A6FA4
BestRank
Statement
http://www.wikidata.org/entity/statement/Q56212948-9AC3E05E-56CB-4956-994B-2B8AB01A6FA4
Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process
P2888
Q56212948-9AC3E05E-56CB-4956-994B-2B8AB01A6FA4
BestRank
Statement
http://www.wikidata.org/entity/statement/Q56212948-9AC3E05E-56CB-4956-994B-2B8AB01A6FA4
rank
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type
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Statement
P2888
s00542-013-1816-x