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Q56212948
Q56212948
Dataset
https://www.wikidata.org/wiki/Special:EntityData/Q56212948
Q56212948
Dataset
https://www.wikidata.org/wiki/Special:EntityData/Q56212948
about
Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process
dateModified
2020-04-26T11:04:38Z
http://www.w3.org/2001/XMLSchema#dateTime
version
1,166,770,974
http://www.w3.org/2001/XMLSchema#integer
identifiers
2
http://www.w3.org/2001/XMLSchema#integer
sitelinks
0
http://www.w3.org/2001/XMLSchema#integer
statements
16
http://www.w3.org/2001/XMLSchema#integer
type
Dataset