2MeV electron irradiation effects on bulk and interface of atomic layer deposited high-k gate dielectrics on silicon
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2MeV electron irradiation effects on bulk and interface of atomic layer deposited high-k gate dielectrics on silicon
description
im Mai 2013 veröffentlichter wissenschaftlicher Artikel
@de
wetenschappelijk artikel
@nl
наукова стаття, опублікована в травні 2013
@uk
name
2MeV electron irradiation effe ...... -k gate dielectrics on silicon
@en
2MeV electron irradiation effe ...... -k gate dielectrics on silicon
@nl
type
label
2MeV electron irradiation effe ...... -k gate dielectrics on silicon
@en
2MeV electron irradiation effe ...... -k gate dielectrics on silicon
@nl
prefLabel
2MeV electron irradiation effe ...... -k gate dielectrics on silicon
@en
2MeV electron irradiation effe ...... -k gate dielectrics on silicon
@nl
P2093
P50
P1433
P1476
2MeV electron irradiation effe ...... -k gate dielectrics on silicon
@en
P2093
I. Tsunoda
K. Takakura
P304
P356
10.1016/J.TSF.2013.02.004
P577
2013-05-01T00:00:00Z