Etching (microfabrication)
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.
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Etching (microfabrication)
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.
has abstract
Etching is used in microfabric ...... mask, such as silicon nitride.
@en
La gravure (aussi appelée parf ...... nombreuses étapes de gravure.
@fr
Селективное травление (или изб ...... удаляет преимущественно AlAs).
@ru
يُستخدم النقش في التصنيع الدقي ...... مقاومة، مثل نيتريد السيليكون.
@ar
刻蚀(英語:etching)是半导体器件制造中利用化学途径选 ...... 蚀罩需要耐受某些化学物质,氮化硅就可以用来制造这样的“罩”。
@zh
微細加工におけるエッチングは、製造過程でウェハーの表面から層 ...... ナイトライドなどのより耐久性のあるマスクが必要な場合もある。
@ja
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Etching is used in microfabric ...... mask, such as silicon nitride.
@en
La gravure (aussi appelée parf ...... nombreuses étapes de gravure.
@fr
Селективное травление (или изб ...... удаляет преимущественно AlAs).
@ru
يُستخدم النقش في التصنيع الدقي ...... مقاومة، مثل نيتريد السيليكون.
@ar
刻蚀(英語:etching)是半导体器件制造中利用化学途径选 ...... 蚀罩需要耐受某些化学物质,氮化硅就可以用来制造这样的“罩”。
@zh
微細加工におけるエッチングは、製造過程でウェハーの表面から層 ...... ナイトライドなどのより耐久性のあるマスクが必要な場合もある。
@ja
label
Etching (microfabrication)
@en
Gravure (microfabrication)
@fr
Селективное травление
@ru
نقش (تصنيع دقيق)
@ar
エッチング (微細加工)
@ja
刻蚀
@zh