Optical proximity correction
Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The need for OPC is seen mainly in the making of semiconductor devices and is due to the limitations of light to maintain the edge placement integrity of the original design, after processing, into the etched image on the silicon wafer. These projected images appear with irregularities such as line widths that are narrower or wider than designed, these are amenable to compensation by changing the pattern on the photomask used for imaging. Other distortions such as rounded corners are driven by the resolution of the optical imaging tool and are harder to compensate for. Such distortions, if not corrected for, may significantly alt
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Optical proximity correction
Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The need for OPC is seen mainly in the making of semiconductor devices and is due to the limitations of light to maintain the edge placement integrity of the original design, after processing, into the etched image on the silicon wafer. These projected images appear with irregularities such as line widths that are narrower or wider than designed, these are amenable to compensation by changing the pattern on the photomask used for imaging. Other distortions such as rounded corners are driven by the resolution of the optical imaging tool and are harder to compensate for. Such distortions, if not corrected for, may significantly alt
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La correction optique de proxi ...... iés au procédé de fabrication.
@fr
Optical proximity correction ( ...... requires a smaller spot size.
@en
Optical proximity correction ( ...... e (193 nm) zum Einsatz kommen.
@de
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La correction optique de proxi ...... iés au procédé de fabrication.
@fr
Optical proximity correction ( ...... ted for, may significantly alt
@en
Optical proximity correction ( ...... e (193 nm) zum Einsatz kommen.
@de
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Correction optique de proximité
@fr
Optical proximity correction
@de
Optical proximity correction
@en