Influence of topographically patterned angled guidelines on directed self-assembly of block copolymers.

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Influence of topographically patterned angled guidelines on directed self-assembly of block copolymers.

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2017 nî lūn-bûn

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2017年の論文

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2017年学术文章

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2017年学术文章

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2017年学术文章

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2017年学术文章

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2017年学术文章

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2017年学术文章

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2017年學術文章

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2017年學術文章

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name

Influence of topographically p ...... -assembly of block copolymers.

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Influence of topographically p ...... -assembly of block copolymers.

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type

Item

label

Influence of topographically p ...... -assembly of block copolymers.

@en

Influence of topographically p ...... -assembly of block copolymers.

@nl

prefLabel

Influence of topographically p ...... -assembly of block copolymers.

@en

Influence of topographically p ...... -assembly of block copolymers.

@nl

P1476

Influence of topographically p ...... f-assembly of block copolymers

@en

P2093

C Grant Willson

http://www.w3.org/2001/XMLSchema#string

Christopher J Ellison

http://www.w3.org/2001/XMLSchema#string

Gregory Blachut

http://www.w3.org/2001/XMLSchema#string

Vaidyanathan Sethuraman

http://www.w3.org/2001/XMLSchema#string

Venkat Ganesan

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P2860

Perpendicularly oriented sub-10-nm block copolymer lamellae by atmospheric thermal annealing for one minute.

Double-Patterned Sidewall Directed Self-Assembly and Pattern Transfer of Sub-10 nm PTMSS-b-PMOST.

Rectangular patterns using block copolymer directed assembly for high bit aspect ratio patterned media.

Quantitative Three-Dimensional Characterization of Block Copolymer Directed Self-Assembly on Combined Chemical and Topographical Prepatterned Templates.

Directed self-assembly of block copolymers for nanolithography: fabrication of isolated features and essential integrated circuit geometries.

Directed self assembly of block copolymers using chemical patterns with sidewall guiding lines, backfilled with random copolymer brushes.

Three-Tone Chemical Patterns for Block Copolymer Directed Self-Assembly.

Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates

P304

052501

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P31

scholarly article

P356

10.1103/PHYSREVE.96.052501

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P407

English

P433

5-1

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P478

http://www.w3.org/2001/XMLSchema#string

P50

Nathan Rebello

P577

2017-11-08T00:00:00Z

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P698

29347737

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P921

self-assembly