Controlling the Composition of Doped Materials by ALD: A Case Study for Al-Doped TiO[sub 2] Films

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Controlling the Composition of Doped Materials by ALD: A Case Study for Al-Doped TiO[sub 2] Films

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im Januar 2008 veröffentlichter wissenschaftlicher Artikel

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wetenschappelijk artikel

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наукова стаття, опублікована у 2008

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Controlling the Composition of ...... for Al-Doped TiO[sub 2] Films

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Controlling the Composition of ...... for Al-Doped TiO[sub 2] Films

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Controlling the Composition of ...... for Al-Doped TiO[sub 2] Films

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Controlling the Composition of ...... for Al-Doped TiO[sub 2] Films

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Controlling the Composition of ...... for Al-Doped TiO[sub 2] Films

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Controlling the Composition of ...... for Al-Doped TiO[sub 2] Films

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P1476

Controlling the Composition of ...... for Al-Doped TiO[sub 2] Films

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P2093

Cheol Seong Hwang

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Gyu-Jin Choi

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Seong Keun Kim

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P2860

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Chemically Conformal ALD of SrTiO[sub 3] Thin Films Using Conventional Metallorganic Precursors

High dielectric constant TiO2 thin films on a Ru electrode grown at 250 °C by atomic-layer deposition

P304

G27

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P31

scholarly article

P356

10.1149/1.2909768

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P433

http://www.w3.org/2001/XMLSchema#string

P478

http://www.w3.org/2001/XMLSchema#string

P577

2008-01-01T00:00:00Z

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