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1
1.4775603
1.4775603
http://dx.doi.org/10.1063/1.4775603
Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor.
P356
Q51263360-AFA3B818-B2DA-491A-BC26-698D65B1CA56
P356
1.4775603
http://dx.doi.org/10.1063/1.4775603