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1
Q51263360-AFA3B818-B2DA-491A-BC26-698D65B1CA56
Q51263360-AFA3B818-B2DA-491A-BC26-698D65B1CA56
BestRank
Statement
http://www.wikidata.org/entity/statement/Q51263360-AFA3B818-B2DA-491A-BC26-698D65B1CA56
Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor.
P356
Q51263360-AFA3B818-B2DA-491A-BC26-698D65B1CA56
BestRank
Statement
http://www.wikidata.org/entity/statement/Q51263360-AFA3B818-B2DA-491A-BC26-698D65B1CA56
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
3601cd5ca042cc4b4db0394d6b0baf73b5032554
P356
10.1063/1.4775603
http://www.w3.org/2001/XMLSchema#string
P356
1.4775603