Single-digit-resolution nanopatterning with extreme ultraviolet light for the 2.5 nm technology node and beyond.
about
Single-digit-resolution nanopatterning with extreme ultraviolet light for the 2.5 nm technology node and beyond.
description
2015 nî lūn-bûn
@nan
2015年の論文
@ja
2015年論文
@yue
2015年論文
@zh-hant
2015年論文
@zh-hk
2015年論文
@zh-mo
2015年論文
@zh-tw
2015年论文
@wuu
2015年论文
@zh
2015年论文
@zh-cn
name
Single-digit-resolution nanopa ...... nm technology node and beyond.
@en
Single-digit-resolution nanopa ...... nm technology node and beyond.
@nl
type
label
Single-digit-resolution nanopa ...... nm technology node and beyond.
@en
Single-digit-resolution nanopa ...... nm technology node and beyond.
@nl
prefLabel
Single-digit-resolution nanopa ...... nm technology node and beyond.
@en
Single-digit-resolution nanopa ...... nm technology node and beyond.
@nl
P2093
P2860
P356
P1433
P1476
Single-digit-resolution nanopa ...... nm technology node and beyond.
@en
P2093
P2860
P304
P356
10.1039/C4NR07420C
P407
P577
2015-03-01T00:00:00Z